Assuring measurement traceability to ATE systems for MEMS temperature sensors testing and calibration

In the framework of an EMPIR joint research project (MET4FoF - Metrology for Factory of Future), a facility is being developed to provide in-situ measurement traceability to next-generation of Automated Test Equipment (ATE) systems used in MEMS temperature sensors testing and calibration. The above measurement traceability concepts are demonstrated in a testbed developed by SPEA in collaboration with INRIM and IPQ. The experimental work comprises both the factory-side implementation and the laboratory-side developments of a special calibration facility, to cover the temperature range between approximately -60 °C and 200 °C. On the factory side, SPEA develops a novel ATE prototype system, based on the concepts of good metrology practice, with the possibility to calibrate/validate in-situ the electronic circuitry and the on-board reference temperature sensors. The novel ATE prototype implements: • An improved temperature control system, with a new design of heaters, temperature sensors and MEMS temperature conditioning features. • A CPU software/firmware improvements to store sensors’ calibration coefficients and allow a “one-touch calibration” feature (i.e. a fully automatic process able to perform a comparison calibration of the ATE on-board reference temperature sensors). • An assessment of thermal conditions (homogeneity, heat losses, boundary effects) to estimate temperature calibration uncertainty. • A so-called “reference fixture”, i.e. an instrumented sensor socket equipped with a network of laboratory-calibrated reference sensors. On the laboratory side, INRIM develops calibration facilities and measurements methods to provide traceable temperature and electrical measurements to the above ATE systems. A custom equipment is developed to accommodate the sensors belonging to the reference fixture in order to calibrate them by comparison in a thermostatic bath. IPQ deals with the numerical simulation, by means of a 3D model of the temperature uniformity of the thermal chuck i.e. the ATE component providing the thermal stimulus to the MEMS under test. The simulation data will be used to help the SPEA hardware designer to improve the type, number and position of reference sensors on the thermal chuck to provide a more reliable and metrologically characterized thermal stimulus. The final paper will describe how an ATE machine works and in which parts it consists and how it is modified to reach the final goal. Furthermore, simulation data will be cross-compared with experimental data coming from metrological characterization before and after the ATE improvements in order to demonstrate their effectiveness. Also the method to assure traceability in large-scale temperature MEMS testing will be detailed and an example of application will be reported. Finally, it is expected that the outcome of this work will impact the quality and reliability of the MEMS sensors largely used in consumer electronics and will extend the calibration capability provided by INRIM to such an expanding industrial sector

Status and Strategy for Moisture Metrology in European Metrology Institutes

Measurement of moisture in materials presents many challenges, due to diverse measuring principles, sample interactions with atmosphere, and variation in what is measured (either water content alone or moisture including other liquids). Calibrations are variously referenced to published standard methods, primary calibration facilities, or certified reference materials, but each of these addresses limited substances and ranges of measurement. Overall, metrology infrastructure is not as fully developed or coherent for this field as it is for many other areas of measurement. In order to understand the metrology needs and to support developments, several European national metrology institutes (NMIs) have undertaken some collaborative activities. These have included a “cooperation in research” project for sharing of information, a survey of moisture capabilities at NMIs, the formulation of a strategy for moisture metrology at the NMI level, and a funded research project to develop improved metrology for the moisture field. This paper summarizes the information gathered, giving an overview of the status of moisture metrology at NMIs, and it reports a proposed strategy to improve the current situation

Word add-in for ontology recognition: semantic enrichment of scientific literature

<p>Abstract</p> <p>Background</p> <p>In the current era of scientific research, efficient communication of information is paramount. As such, the nature of scholarly and scientific communication is changing; cyberinfrastructure is now absolutely necessary and new media are allowing information and knowledge to be more interactive and immediate. One approach to making knowledge more accessible is the addition of machine-readable semantic data to scholarly articles.</p> <p>Results</p> <p>The Word add-in presented here will assist authors in this effort by automatically recognizing and highlighting words or phrases that are likely information-rich, allowing authors to associate semantic data with those words or phrases, and to embed that data in the document as XML. The add-in and source code are publicly available at <url>http://www.codeplex.com/UCSDBioLit</url>.</p> <p>Conclusions</p> <p>The Word add-in for ontology term recognition makes it possible for an author to add semantic data to a document as it is being written and it encodes these data using XML tags that are effectively a standard in life sciences literature. Allowing authors to mark-up their own work will help increase the amount and quality of machine-readable literature metadata.</p